Optimum mask and source patterns to print a given shape
نویسندگان
چکیده
منابع مشابه
Integration Patterns Applied to Print Production
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2002
ISSN: 1932-5150
DOI: 10.1117/1.1448500